微电铸层内应力超声去除实验(英文)  

Experiments on Ultrasonic Stress Relief Used in Micro Electrodeposited Coating

作　　者：杜立群[1,2] 宋磊[2] 王启佳[2] 刘冲[1,2] 

机构地区：[1]大连理工大学精密与特种加工教育部重点实验室,大连116024 [2]大连理工大学辽宁省微纳米技术及系统重点实验室,大连116024

出　　处：《纳米技术与精密工程》2010年第2期143-148,共6页Nanotechnology and Precision Engineering

基　　金：国家自然科学基金资助项目(50675025);国家科技支撑计划资助项目(2006BAF04B13)

摘　　要：针对Ni微电铸层中内应力过大的问题,提出用超声时效技术去除铸层内应力的方法.利用自行研制的超声设备对铸层内应力进行去除,借助X射线衍射仪和应力测量公式求得超声前后的内应力大小,并对实验结果进行对比.结果显示,铸层内应力在50min时去除最为明显,平均应力由-209.0MPa减小到-109.0MPa,减小了100MPa,消除率达到47.9%.可知在合适的实验参数下利用超声时效技术可以有效地减小和消除电铸层的内应力.超声时效去应力效果与热处理效果相当,能够满足微器件的使用要求,具有一定的实用价值.To solve the problem of internal stress in Ni micro electrodeposited coating,ultrasonic stress relief technology was introduced and a self-developed ultrasonic stress relief equipment was employed to release the stress.Based on X-ray diffraction（XRD）and the stress measurement formula,the values of internal stress before and after the ultrasonic stress relief process were compared.The results show that the internal stress in Ni electrodeposited coating could be reduced by 100 MPa from-209.0 MPa to-109.0 MPa with the relief rate of 47.9%.The internal stress in Ni electrodeposited coating could be effectively reduced when the proper parameters of ultrasonic stress relief are chosen.The contrast experiment of ultrasonic stress relief technology and heat treatment was performed.It is possible to conclude that the stress relief effects of two methods are equivalent.Therefore,ultrasonic stress relief technology can make micro device meet the operating requirement,and has certain practical value.

关 键 词：应力超声去除 Ni微电铸层 内应力 X射线衍射 

分 类 号：TQ153.4[化学工程—电化学工业]