Nd:YAG调Q脉冲激光器微孔实验研究  

Nd: YAG Q-modulated Pulse Laser Micro-hole Experimental Study

作　　者：冯驰[1] 李强[1] 姜梦华[1] 王宝华[1] 

机构地区：[1]北京工业大学激光工程研究院,北京100124

出　　处：《北京工业大学学报》2010年第3期420-424,共5页Journal of Beijing University of Technology

基　　金：国家自然科学基金资助项目(60678014)

摘　　要：为了输出高功率、高光束质量的脉冲激光以及制备高质量微孔，对平凸非稳腔结构进行了理论分析，给出了腔参数变化曲线．设计出了高功率、高光束质量的平凸非稳腔灯泵浦脉冲Nd：YAG调Q激光器．激光脉冲能量为500mJ，峰值功率达到5MW，光束参数积优于4．2mm·mrad．分别在0．04—0．07mm厚度金属碳钢及1mm厚度非金属陶瓷上进行了微孔打孔实验，得到了百微米微孔．The purpose of this paper is researching about high-power and high beam quality laser as well as the experiment of the high-quality micro-hole. The theoretical analysis of the plane-convex unstable laser resonator structure is introduced. The parameter about resonator is analyzed. The high-power and high beam quality pulsed Nd： YAG laser with the plane-convex unstable laser resonator pumped by lamp is designed. The output of laser pulse energy is 500 mJ; the peak power is 5 MW. The beam parameter product （BPP） is superior to 4.2 ram. mrad. Using the laser for drilling processing experiment on metal （ steel material） with different thickness from 0.04 mm to 0.07 mm and non-metal （ceramics material） with 1 mm thickness is achieved.

关 键 词：光束质量 ND:YAG脉冲激光器 激光非稳腔 激光打孔 激光技术 

分 类 号：TN248.1[电子电信—物理电子学]