半导体激光列阵慢轴准直和聚焦特性  

Collimation and Focus Characteristics of Slow-axis Beams of Diode Laser Array

作　　者：丁鹏[1] 曹银花[1] 祁俊峰[1] 王晓薇[2] 左铁钏[1] 

机构地区：[1]北京工业大学激光工程研究院,北京100124 [2]中国科学院半导体研究所海特光电有限责任公司,北京100083

出　　处：《北京工业大学学报》2010年第3期429-432,共4页Journal of Beijing University of Technology

基　　金：北京市自然科学基金资助项目(4082005);北京市教委科研资助项目(KM200810005023);北京工业大学博士启动基金(52101012200704)

摘　　要：采用2块柱面透镜组成的望远镜系统对一个输出功率300 W的大功率半导体激光堆栈慢轴进行准直和聚焦,此堆栈由5个输出功率为60 W的列阵堆叠组成,中心波长808 nm.测量了由不同焦距的柱面透镜组合的光路聚焦后的腰斑直径,比较了柱面透镜的面型参数对腰斑直径的影响.使用Zemax软件模拟了光路,分析了系统的像差.在准直镜焦距f1=200 mm,聚焦镜焦距f2=100 mm时,光斑功率密度为3.05 kW/cm2.在316L不锈钢的辐照实验中,材料表面出现蒸发沟槽,熔化区深宽比约为0.5.The slow-axis of a high power diode laser stack is collimated and focused by a telescope system that consisted of two pieces of cylindrical lens. The stack is consisted of five diode laser array each power is 60 W, and the central wavelength is 808 nm. We test the waist sizes of the beam in the system consisted of different lenses, and study the affection of the cylindrical focal length on it. Beam paths of the telescope system are simulated by Zemax software, and the system aberration is analyzed. When the slow-axis collimating focal length is 200 mm, the focusing length is 100 mm, we can get the laser power density at 3.05 kW/cm2. Under these experimental conditions, the irradiation test of 316L stainless steel is conducted, vaporized groove is found on the plate and depth-to-width ratio is about 0.5.

关 键 词：半导体激光列阵 慢轴 柱面透镜 准直 

分 类 号：TN248.4[电子电信—物理电子学]