复合型光子筛及其在大口径成像中的应用  

Composite Photon Sieve and Its Application in Large Aperture Imaging

作　　者：潘一鸣[1] 谢常青[1] 贾佳[1] 

机构地区：[1]中国科学院微电子研究所纳米加工与新器件集成实验室,北京100029

出　　处：《光电工程》2010年第4期88-92,共5页Opto-Electronic Engineering

基　　金：国家基础科学重大研究计划项目(2007CB935302);国家自然科学基金项目(60825403)

摘　　要：传统光子筛在大口径成像领域具有衍射效率低和制造数据量巨大的缺陷,这导致它们很难在实际应用中被采用。本文提出了一种复合型光子筛,该复合型光子筛将普通光子筛半径的中间1/3部分用波带环来替代。仿真结果显示,采用这种设计的光子筛不仅可以有效减小制造数据量,还能提高衍射效率。我们在成像试验中对比了具有相同特征尺寸的普通光子筛和复合型光子筛,结果显示复合型光子筛能够减少38%的设计数据量并且具有更高的成像对比度。因此,这种复合型光子筛在大口径X射线成像领域中具有很好的应用前景。Large aperture photon sieve for imaging often has low efficiency and huge size of GDSII file, which makes their implementation difficult in practice. The composite photon sieve which compounds the zone plate to the R/3-2R/3 part of the conventional photon sieve is presented. The simulation result shows that the element can reach higher diffraction efficiency and significantly reduce the GDSII file size. In the experiment, a conventional photon sieve and a composite photon sieve with the same feature size are designed. The imaging result shows that the composite photon sieve can reduce the GDSII file size by 38% and has a better contrast than the conventional photon sieve. Therefore, the composite photon sieve is a good element applied in large aperture imaging in soft X-rays.

关 键 词：衍射光学 复合型光子筛 成像 制造数据量 

分 类 号：TN256[电子电信—物理电子学]