大功率半导体激光器腔面抗烧毁技术  

Improvement of the Facet Reliability of High Power Semiconductor Lasers

作　　者：李永[1] 杨红伟[1] 陈宏泰[1] 张世祖[1] 彭海涛[1] 

机构地区：[1]中国电子科技集团公司第十三研究所,石家庄050051

出　　处：《微纳电子技术》2010年第4期207-212,222,共7页Micronanoelectronic Technology

基　　金：国家部委基金资助项目

摘　　要：首先介绍了连续激光器单管老化试验,试验通过测试不同老化时间激光器腔面的烧毁功率,对腔面烧毁发生的过程进行了分析。分析认为,大功率半导体激光器腔面烧毁失效的根本原因是腔面烧毁功率在老化过程中持续减小,最终低于激光器输出功率,造成激光器灾变性光学镜面破坏(COMD)。随后对腔面烧毁的微观物理机理进行了介绍,重点讨论了腔面缺陷相关的非辐射复合、量子阱带边吸收、自由载流子吸收造成的腔面温度升高以及腔面高温导致腔面缺陷密度增加并且向腔内攀移的微观过程。最后,介绍了电流非注入腔面、大光腔材料、长腔长设计、腔面离子铣钝化工艺等腔面抗烧毁技术研究情况,并对这些技术提高腔面抗烧毁功率以及改善腔面长期稳定性的效果进行了讨论。The laser aging experiment was presented and the damage powers during different aging time periods were measured,through which the analysis of the facet damage failure was made.The results indicate that the damage power decreases with the aging time and becomes less than the laser output power at last,which is the perpetuating factor that causes the laser catastrophic optical mirror damage（COMD）.The micro-physical mechanism of the COMD was investigated,with emphasis on the non-radiative recombination related to facet defects,the absorption related to QW band side,the increase of the facet temperature caused by the absorption of free carriers,the increment of facet defects,and the stretch into the cavity interior due to high temperature of the facet.Finally,the progress of the techniques such as the current non-injection facet,large optical cavity material,long cavity length design,and facet ablation and passivation was introduced,and the effects of these techniques on enhancing COMD power and its long-term stability were discussed.

关 键 词：大功率半导体激光器 灾变性光学镜面损伤 非辐射复合 电流非注入腔面 腔面离子铣 大光腔材料 

分 类 号：TN248.4[电子电信—物理电子学]