BCB/SiO_2双导芯层叠ARROW结构压力传感器设计  

Design of BCB/SiO_2 Dual-Core Stacked ARROW Pressure Sensors

作　　者：禹忠[1] 李蓉[2] 王海容[1] 蒋庄德[1] 

机构地区：[1]西安交通大学机械制造系统工程国家重点实验室,西安710049 [2]西安机电信息研究所,西安710065

出　　处：《微纳电子技术》2010年第4期237-241,共5页Micronanoelectronic Technology

基　　金：国家高技术研究发展(863)计划资助项目(2009AA04Z330);国家自然科学基金资助项目(50535030)

摘　　要：针对传统ARROW压力传感器耦合长度长以及耦合效率低,提出了BCB/SiO2双导芯层叠ARROW结构压力传感器。在外力作用下,弹性薄膜上的BCB/SiO2双导芯层叠ARROW结构,会因光弹效应致使BCB和SiO2两个导芯折射率变化产生输出相位差。通过有限元方法(FEM)研究硅弹性薄膜上导芯折射率的变化与应力分布关系,确定传感器的结构设计参数。使用束传播法(BPM)分析耦合结构以及压力与输出之间的关系。结果表明,该传感器无需弯曲波导即可降低器件尺寸,并实现了灵敏度为5.2×10-2/kPa压力检测。BCB/SiO 2 dual-core stacked ARROW pressure sensors were presented to reduce the coupling length and improve the coupling efficient for traditional ARROW sensors.When the external pressure was applied to the BCB/SiO 2 dual-core stacked ARROW on the diaphragm,the output phase difference was yielded between the BCB and SiO 2 guided core for an index change induced by the photoelastic effect.The relation between guided core index change and stress distribution of the stacked ARROW was studied with the finite element method（FEM）by ANSYS.The index distribution by the stress on the sensing arm was calculated to design the structure parameters.The coupling efficient on the coupling structure,the output change in the sensing arm caused by photoelastic effect and the applied pressure were finally analyzed with the beam propagation method（BMP）.The results indicate that the sensitivity of the compact sensor can achieve 5.2×10-2/kPa and the device size can be reduced without any bending structure.

关 键 词：抗共振反射光波导 压力传感器 有限元方法 束传播法 光弹性效应 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]