郎奇法检测大口径光学非球面镜  

Large-Aperture Aspheric Surfaces with Ronchi Grating Test Method

作　　者：王刚[1] 周晨波[1] 王同乐[1] 赵亚伟[1] 郭冰[1] 

机构地区：[1]烟台大学光电信息学院,山东烟台264005

出　　处：《光学与光电技术》2010年第2期46-49,共4页Optics & Optoelectronic Technology

摘　　要：提出了一种用朗奇法定量检测大口径非球面的新技术。主要以大口径非球面镜的加工表面为研究对象,设计了大口径非球面检测系统,该系统由CCD摄像机、He-Ne激光器、郎奇光栅、微型计算机等组成。并利用大口径非球面检测系统对一个顶点曲率半径为1638.69 mm,被测曲面半通光口径为315 mm的光学元件的面形进行了实际测量,给出了光学元件标准偏差和峰谷值测量结果。最后对测量结果进行了讨论。研究结果表明:基于郎奇法的几何原理,利用CCD摄像系统定量检测大口径非球面的方法具有较高的精度。A measurement method of the large-aperture aspheric surfaces with the ronchi wonderful legal quantity the new technology was proposed. The large-aperture aspheric surfaces mirror＇s processing surface was taken as the example of study. The large-aperture aspheric surfaces examination system was designed. This system was composed by the CCD camera, the He-Ne laser, the ronchi grating, the microcomputer. By using the large aperture aspherie surfaces examination system, the face shape was measured, when the apex radius of curvature was 638. 69 mm, the half light culiker was 315 mm. The optical element standard deviation and the valley value measurement were presented. The results show that based on the ge- ometry priciple of the Ronchi, the method by using the CCD photograpg system to measure the large aperture aspheric surface has the advantage of high precision.

关 键 词：朗奇光栅 郎奇条纹 Zygo干涉仪 大口径非球面 

分 类 号：O437[机械工程—光学工程]