大行程纳米二维工作台的动态优化设计  

Dynamic optimization design of large travel 2-dof nano-positioning stage

作　　者：余晓芬[1] 程伶俐[1] 胡佳文[1] 余卿[1] 

机构地区：[1]合肥工业大学仪器科学与光电工程学院,合肥230009

出　　处：《电子测量与仪器学报》2010年第3期289-293,共5页Journal of Electronic Measurement and Instrumentation

基　　金：国家自然科学基金项目(编号:50775063)资助项目

摘　　要：为了减小直线电机的电磁推力波动,保证绕线动子与永磁定子有足够的偏心量,对大行程纳米二维位移工作台进行了动态优化设计研究。基于振动理论建立了工作台与上层板系统的动力学模型,并以此模型分析了工作台动力响应与上层板厚的关系,给出了优化设计结果。对工作台进行了全行程定位实验,实验结果表明,工作台可以在0～100mm范围内,实现10nm定位分辨率的快速、高精度定位,满足纳米测量的要求。In order to reduce the electromagnetic thrust fluctuation of the linear motor and ensure the enough eccentricity between winding active cell and permanent magnet stator,dynamic optimization design is carried out upon 2-DOF nano-positioning bench.The dynamic model between the bench and upper plate system is also established according to the vibration theory.It also analyzes the relationship between the dynamic response of the bench and the thickness of upper plate on the basis of the dynamic model and gets the optimization design result.After the whole travel positioning experiment,it indicated that the bench has already realized fast and high accuracy positioning at 10nm positioning resolution within the scope range from 0 to 100 mm and met the nanometer measurement requirement.

关 键 词：动态优化设计 圆筒型永磁直线同步电机 纳米工作台 

分 类 号：TH703.65[机械工程—仪器科学与技术]