无氟MOD法制备DyBa_2Cu_3O_(7-x)膜的高温热处理过程研究  

High Temperature Treatment of DyBa_2Cu_3O_(7-x) Thin Film Prepared by F-Free Metal Organic Deposition Method

作　　者：师晓燕[1] 蒲明华[1] 王文涛[1] 赵勇[1,2] 

机构地区：[1]西南交通大学,磁浮技术与磁浮列车教育部重点实验室,四川成都610031 [2]新南威尔士大学

出　　处：《稀有金属材料与工程》2010年第4期707-710,共4页Rare Metal Materials and Engineering

基　　金：国家自然科学基金(50672078);国家杰出青年基金(50588201);国家'973'项目(2007CB616906)

摘　　要：采用无氟金属有机物沉积法(MOD)在(00l)取向的LaAlO3单晶基底上制备出DyBa2Cu3O7-x(DyBCO)超导薄膜。由于采用了无氟金属有机物体系,分解过程中避免了采用传统的三氟醋酸盐时有害气体的产生。SEM分析表明,成相过程中增加高温热处理过程,可以明显提高外延生长薄膜的质量。X射线衍射(XRD)分析及φ扫描的结果表明,经过高温处理的DyBCO薄膜具有良好的面内外织构。本研究制备的DyBCO薄膜的超导转变温度达92K,77K自场下的临界电流密度达到1.8MA/cm2。Epitaxial DyBa2Cu3O7-x（DyBCO） superconductive thin film was fabricated via a F-free metal organic deposition （MOD） method on the （001） single crystal substrate of LaAlO3. Because of the fluorine-free metal organic system, harmful gas by the normal TFA-MOD approach was avoided during the heat treatment. A high temperature treatment was introduced during the growth of DyBCO film and then the SEM observation shows denser microstructure and better texture of the film. X-ray diffraction pattern reveals the c-axis oriented grains φ-scan also shows an excellent in-plane texture in the DyBCO film with a high temperature treatment. The DyBCO film fabricated by F-free MOD with a high temperature treatment has a superconductivity transition temperature of 92 K and a critical current density of 1.8 MA/cm2 at 77 K in self-field.

关 键 词：无氟MOD 高温热处理 DyBCO薄膜 

分 类 号：O484.1[理学—固体物理]