EBSD花样的图像畸变及其修正  

Distortion and modification of electron back scatter diffraction pattern

作　　者：庞年斌[1] 韩明[1] 陈晶[2] 陈方远[3] 于忠辉[1] 尹文红[1] 

机构地区：[1]山东理工大学机械工程学院,山东淄博255049 [2]北京大学物理学院电镜室,北京100871 [3]中国地质科学院地质研究所,北京100037

出　　处：《电子显微学报》2010年第1期12-16,共5页Journal of Chinese Electron Microscopy Society

基　　金：山东省自然科学基金(No.Y2006F61);教育部留学回国人员科研启动基金资助项目

摘　　要：EBSD花样存在图像畸变,使得由其三维重构解析晶体Bravais点阵变得困难。本文详细介绍了EBSD衍射数据几何修正的方法:利用样品到屏幕的距离,由EBSD花样上的衍射数据修正晶体倒易矢量的长度及其夹角。使用透辉石晶体的EBSD花样,验证了几何修正的效果,结果表明衍射测量数据经过修正并用最小二乘法重新拟合后,倒易矢量偏离二维拟合网格的程度降低,其分布更接近真实情况。The three dimensional reconstruction of Bravais lattice for unknown crystals by means of electron backscatter diffraction（EBSD） pattern is difficult due to the existence of distortion in the Kikuchi pattern.In the present work a new method has been proposed and introduced in detail,which is applied to geometrically correct the length of reciprocal vectors and angles between them according to specimen-to-screen distance.The corrected results have been checked using the EBSD pattern obtained from diopside crystal.It is confirmed that after the geometric correction,the distribution of the reciprocal vectors matches well the network fitted by the least-squares and exhibits the inherent geometry characteristics.

关 键 词：电子背散射衍射 衍射花样 菊池花样 图像畸变 

分 类 号：O74[理学—晶体学]