一种新型激光测量仪在X-Y工作台定位误差动态测量和补偿中的应用  

Application of a New Type of Laser Vibration Measurer on the Dynamic Measurement and Compensation of Position Errors of X-Y Table

作　　者：丁海峰[1] 

机构地区：[1]聊城职业技术学院,山东聊城252000

出　　处：《机床与液压》2010年第6期82-84,共3页Machine Tool & Hydraulics

摘　　要：论述新型激光测量仪OFV-5000的测量原理和方法,分析X-Y工作台定位误差的构成,指出滚珠丝杠的螺距误差是影响工作台定位精度的主要因素,结合实验室的具体情况设计了一种X-Y工作台定位误差的动态测量方法。在分析定位误差的基础上,提出采用前馈补偿方法减小定位误差,并通过实验证明前馈补偿对提高系统定位精度非常有效。The principle and measurement method of a new type of laser vibrometer controller OFV - 5000 were introduced, the composition of position errors of X - Y table was analyzed, it was pointed out that the cumulation error of screw rod is the primary factor which affects the position error of the X - Y table. A method of dynamic measurement and compensation of position errors of X - Y table was presented. The position errors were analyzed, the feedforward compensatory means was put forward to reduce the position errors and the experiment verifies the effectiveness of the method.

关 键 词：X—Y工作台 激光测量仪OFV-5000 定位误差 动态测量 补偿 

分 类 号：TH-39[机械工程]