溅射薄膜热电偶在非金属结构表面瞬态温度测量中的应用研究  

Application Study of Film Sputterillg Thermocouple on Transient Temperature Measure on Nonmetal Sample Surface

作　　者：郝庆瑞[1] 姜亚军[1] 

机构地区：[1]中国飞机强度研究所,西安710065

出　　处：《宇航计测技术》2010年第2期21-25,共5页Journal of Astronautic Metrology and Measurement

基　　金：航空科学基金(No.20060923001)

摘　　要：介绍了利用薄膜成型技术,在非金属试验件表面用真空离子溅射技术制作薄膜热电偶,进行表面温度测量,并探讨薄膜热电偶在瞬态加热条件下与粘贴的常规热电偶在测温结果上的区别,为今后将薄膜制作技术应用于温度、热流密度及高温应变测量打下基础。The film thermocouple for measuring the surface temperature is made by using film Sputterillg technique on the surtace of nonmetal sample. The difference between film thermocouple and standard stickup thermocouple in the condition of transient high temperature are discussed. The basis for applying film making technique to measure heat flux and high temperature strain in the future was established by the production.

关 键 词：溅射 薄膜 温度测量 热电偶 

分 类 号：TH765[机械工程—仪器科学与技术]