非制冷微悬臂梁式红外焦平面探测器读出电路设计  

DESIGN OF READOUT INTEGRATED CIRCUIT FOR UNCOOLED INFRARED FOCAL PLANE ARRAYS BASED ON MICROCANTILEVER

作　　者：曹君敏[1] 陈中建[1] 鲁文高[1] 张雅聪[1] 雷科[1] 赵宝瑛[1] 

机构地区：[1]北京大学微电子学系,微电子器件与电路教育部重点实验室,北京100871

出　　处：《红外与毫米波学报》2010年第2期97-101,共5页Journal of Infrared and Millimeter Waves

基　　金：国家863高技术研究资助项目(2009AA04Z316)

摘　　要：针对非制冷微悬臂梁电容式红外探测器,设计了一款焦平面读出电路.根据电路噪声建模与分析,对电路进行了优化设计以抑制噪声.采用0.35μm的CMOS工艺设计,制造了16×16读出电路原型.测试结果表明,5V电源电压、50Hz帧频下电路总功耗为16.5mW,典型工作模式下线性度为99.2%,通道一致性大于97%,等效输入噪声电荷小于150e.A readout integrated circuit （ROIC） of focal plane arrays for uncooled infrared detectors based on microcantilever was designed.The ROIC was optimized to reduce noise based on noise modeling and analysis.A prototype of 16×16 ROIC was designed and fabricated by 0.35μm CMOS technology.The measurement results show that the power dissipation is 16.5mW for a 5V supply voltage at 50Hz frame rate,the linearity is 99.2% at typical modes,the uniformity is larger than 97% and the equivalent noise charge （NEC） is below 150e.

关 键 词：非制冷 红外焦平面阵列 微悬臂梁 读出电路 

分 类 号：TN216[电子电信—物理电子学]