飞秒激光制造微型光纤法布里-珀罗干涉传感器  

Fabricating Micro Fiber Fabry-Perot Sensor with Femtosecond Laser Pulses

作　　者：吴易明[1] 李明[2] 程光华[3] 

机构地区：[1]中国科学院西安光学精密机械研究所光学定向与瞄准技术研究室,西安710119 [2]中国科学院西安光学精密机械研究所瞬态光学与光子技术国家重点实验室,西安710119 [3]中国科学院研究生院,北京100049

出　　处：《光子学报》2010年第4期584-587,共4页Acta Photonica Sinica

基　　金：国家自然科学基金(60678013)资助

摘　　要：基于飞秒激光光刻技术,提出了光纤端面光刻制造微型光纤法布里-珀罗干涉传感器的方案.该方案解决了传统飞秒激光制造光纤F-P传感器的平行度差的问题,制造了对比度超过20dB的高灵敏度和高分辨率的微型F-P光纤传感器件.该制造方法简单、参量可控,制作的器件可应用恶劣温度条件下应变的精确测量.Based on femtosecond laser inscription technology, a novel method tor femtosecond laser micromachining system is proposed to fabricate a microfiber Fabry-Perot （F-P） cavity on the fiber end surface. This technique can solve the parallelism problem of the traditional fiber F-P sensors inscribed by femtosecond laser. The F-P interferometric sensor made by the proposed technique shows over 20 dB fringe visibility. This technique is parameter-controllable and easy to implement. It is a promising candidate of strain measurement in the case of extreme temperature circumstances.

关 键 词：飞秒激光 光纤F—P干涉型传感器 平行度和光洁度 

分 类 号：O437[机械工程—光学工程]