A new micro programmable blazed grating (μPBG) and its application to multispectral imaging  

作　　者：YU YiTing YUAN WeiZheng YAN Bin LI TaiPing JIANG ChengYu 

机构地区：[1]Micro and Nano Electromechanical Systems Laboratory, Northwestern Polytechnical University, Xi'an 710072, China

出　　处：《Chinese Science Bulletin》2010年第11期1112-1116,共5页

基　　金：supported by the National Natural Science Foundation of China (Grant No. 50775189) ;the Doctorate Foundation of Northwest-ern Polytechnical University (Grant No. CX200611)

摘　　要：一个新微可编程的燃烧栅栏(PBG ) 被设计，制作并且描绘了使用二层的多晶硅表面 micromachining 过程。介绍的 PBG 在结构简单并且有为一个宽波长范围的连续光谱的调节的能力。最大化运作的燃烧角度，当为栅栏条板的关键部件，和它的高度接近了空气差距，酒窝结构被采用。由大小，发达 PBG 样品能到达 5.19 的一个最大的燃烧角度 ???????? 瘠瑡牥瑩吗？A new micro programmable blazed grating （μPBG） was designed, fabricated and characterized using the two-layer polysilicon surface micromachining process. The μPBG presented is simple in structure and has the capability of continuous spectral tuning for a wide wavelength range. To maximize the operational blazed angle, dimple structure was adopted as the key component for grating slats, and its height was close to the air gap. By the measurements, the developed μPBG sample can reach a maximum blazed angle of -5.19° at a driving voltage of 112 V. Accordingly, the blazed wavelength can reach a mid-infrared wavelength of 4.88 μm. Then, a preliminary experiment to investigate the feasibility of multispectral imaging by using the developed μPBG as the core dispersing element was performed, and the results are encouraging. The advantages of the proposed method for multispectral imaging are discussed, and some suggestions for further research are also put forward.

关 键 词：多光谱成像 闪耀光栅 PBG 可编程 微型 应用 光谱波长 凹坑结构 

分 类 号：TN253[电子电信—物理电子学]