超短脉冲激光辐射固体材料的库仑爆炸烧蚀模型研究  

Research on Semiconductor Coulomb Explosion Induced by Ultra Short Pulsed Laser Radiation

作　　者：肖威[1] 林晓辉[1] 

机构地区：[1]东南大学机械工程学院,江苏南京210096

出　　处：《机械制造与自动化》2010年第2期24-27,141,共5页Machine Building & Automation

摘　　要：在动理论的基础上,采用Vlasov-poisson方程,以多光子吸收、雪崩两种电离机制为产生自由电子源项,从微观描述了激光烧蚀固体材料时的电离机理,以及解释了在此过程中发生的库仑爆炸(Coulomb explosion)。比较了非平衡态和平衡态下的电子分布。In this paper,we use the Vlasov-poisson system to explain the phenomena of coulomb explosion on the basis of the dynamic theory.In this system we treat the source term as two parts,one is avalanche term,the other is multiphoton absorption.We describe the ionization theories in the microcosmic.This paper also compares the distribution of free electron in equilibrium state with the distribution of free electron in nonequilibrium state.

关 键 词：库仑爆炸 超短脉冲激光 烧蚀理论 Vlasov-poisson系统 

分 类 号：TG665[金属学及工艺—金属切削加工及机床]