分块镜共相位误差的电学检测方法  

Electric method for testing co-phasing error of segmented mirrors

作　　者：赵伟瑞[1] 曹根瑞[1] 

机构地区：[1]北京理工大学光电学院,北京100081

出　　处：《红外与激光工程》2010年第1期147-150,共4页Infrared and Laser Engineering

基　　金：国家重点基础研究发展计划(973计划)(2009CB72400601)

摘　　要：实现各分块镜间的光学共相位拼接是合成孔径光学系统高分辨率成像的保证。对分块镜间的光学共相位误差的电学检测方法进行了理论分析和实验验证。利用电容测微原理对相邻分块镜间的光学共相位误差实现了测量,测量范围200μm,分辨率5nm。搭建了分块镜光学共相位误差电学检测实验装置,装置中设置了分块镜位置微调机构以实现相互间的光学共相位拼接;用Fisba移相干涉仪对搭建的实验装置的共相位误差检测及拼接结果进行了实验验证,结果表明了将电容测微法用于共相位误差检测的可行性。该方法不仅测量范围大、灵敏度高;且与光学检测方法相比,未增加光学系统的复杂性。Implementation of optical co-phase among segmented mirrors in synthetical aperture optical system is the guarantee of its imaging with high resolution.In this paper,an electric testing method for co-phasing error among segmented mirrors was analyzed in the theory and proved in experiment.According to the principle of capacitance micrometer method,the co-phasing error between two adjacent segments was measured.With this method,the co-phasing error within 200 μm could be tested and the 5 nm co phasing error could be resolved.An experimental system,to measure the co-phasing error with the electric method,was set up.In this system,some precise components,used to adjust the position of segmented mirror,were built up so that the implementation of the co-phasing could be realized.Using a phase-shift Fisba interferometer,the effects of the co-phase error testing and the piecing together of segmented mirror with the built experimental setup were verified experimentally.And the experimental results indicate that the use of capacitance micrometer method in testing the co-phase error is feasible.The testing method has wide measurement range and high sensitivity,but the complexity of the used optical system does not increase when compared with the optical testing method.

关 键 词：共相位误差检测 电容测微法 分块镜 共相位标定 

分 类 号：O439[机械工程—光学工程]