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作 者:于利明 雷光玖 曹建勇 钟光武 姜韶风 邹桂清 江涛 卢大伦 张贤明 刘鹤
机构地区:[1]Southwestern Institute of Physics, Chengdu 610041
出 处:《Chinese Physics Letters》2010年第5期72-75,共4页中国物理快报(英文版)
摘 要:Arc efficiency is a critical criterion for assessing the performance of the ion source. High are efficiency is necessary for a high power ion source, because it can decrease the load of the arc power supply. Thus the relationship between the discharge parameters (gas pressure, arc voltage, filament current, bias resistance connecting between the anode and plasma grid) and the arc efficiency is investigated in experiment especially. It is found that with increasing pressure, the arc efficiency increases fast if the pressure is below 0.4 Pa, but when it is above 0.4 Pa, the arc efficiency remains unchanged or increases slowly. If we increase the arc voltage or filament current, the arc efficiency decreases. The bias resistance also influences the arc efficiency, at the same pressure the arc efficiency increases with resistance.Arc efficiency is a critical criterion for assessing the performance of the ion source. High are efficiency is necessary for a high power ion source, because it can decrease the load of the arc power supply. Thus the relationship between the discharge parameters (gas pressure, arc voltage, filament current, bias resistance connecting between the anode and plasma grid) and the arc efficiency is investigated in experiment especially. It is found that with increasing pressure, the arc efficiency increases fast if the pressure is below 0.4 Pa, but when it is above 0.4 Pa, the arc efficiency remains unchanged or increases slowly. If we increase the arc voltage or filament current, the arc efficiency decreases. The bias resistance also influences the arc efficiency, at the same pressure the arc efficiency increases with resistance.
分 类 号:TG661[金属学及工艺—金属切削加工及机床] TL503.3[核科学技术—核技术及应用]
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