基于泄漏模共振的多层介质膜光栅宽角谱特性实现  

Realization of the broad angular spectrum of multilayer dielectric gratings based on the leaky mode resonance

作　　者：汪剑鹏 晋云霞[1] 麻健勇[1,2] 邵建达[1] 范正修[1] 

机构地区：[1]中国科学院上海光学精密机械研究所,中国科学院强激光材料科学与技术重点实验室,上海201800 [2]中国科学院研究生院,北京100049

出　　处：《物理学报》2010年第5期3199-3204,共6页Acta Physica Sinica

基　　金：国家自然科学基金(批准号:10704079)资助的课题~~

摘　　要：基于泄漏模共振产生多层介质膜光栅(MDG)的-1级高衍射效率的理论,重点分析了产生MDG的-1级宽衍射角谱的物理机理,提出薄匹配层能有效提高MDG的-1级衍射角谱带宽.采用傅里叶模式理论计算MDG的衍射效率,给出了中心波长为1040nm,Littrow角37.9°附近±11°范围内衍射效率大于90%的宽角谱MDG设计结果,且设计参数具有良好的工艺宽容度.Based on the leaky mode resonance theory,the physical mechanism of producing the broad angular spectrum of Multilayer Dielectric Grating （MDG） in the -1 st order reflection diffraction direction is presented in this paper. It is found that the thin match layer would improve the bandwidth of angular spectrum effectively. A good result of ± 11 degree near Littrow angle 37. 9 over 90% diffraction efficiency centered at 1040nm is obtained,and the parameters of the result have excellent fabrication tolerance. The Fourier modal method is employed for calculating the diffraction efficiency.

关 键 词：介质膜光栅 泄漏模共振 匹配层 宽角谱 

分 类 号：TN253[电子电信—物理电子学]