金刚石纳米粉引晶方法制备金刚石薄膜方法  

Preparation of Diamond Film by Seeding with Nanocrystalline Diamond Powder

作　　者：陈庆东[1] 杨传径[1] 王辉[1] 刘才龙[2] 

机构地区：[1]河南科技大学物理与工程学院,河南洛阳471003 [2]吉林大学超硬材料国家重点实验室,吉林长春130012

出　　处：《河南科技大学学报（自然科学版）》2010年第2期16-19,共4页Journal of Henan University of Science And Technology:Natural Science

基　　金：国家自然科学基金项目(40473034)

摘　　要：利用金刚石纳米粉引晶法和常规研磨方法分别在单晶硅衬底上制备金刚石薄膜,并采用扫描电镜、激光拉曼方法对所制备样品进行表征,通过SEM和拉曼谱分析,与研磨法生长金刚石薄膜相比,利用金刚石纳米粉引晶方法可以大大提高金刚石薄膜的成核速度,生长速率达到2μm/h以上。对相同碳源浓度下生长的金刚石薄膜样品的SEM和拉曼谱分析,采用引晶法生长的金刚石薄膜质量明显高于研磨法。A novel process was proposed to grow the diamond films by seeding with nano-diamond powder.The samples were characterized by scan electron microscope and laser Raman spectrometry.Comparing to the diamond films prepared by the custom grinding method,the nucleation rate and quality of the diamond films were distinctly improved by seeding with nano-diamond powder.

关 键 词：金刚石纳米粉 金刚石薄膜 热丝CVD 研磨法 纳米引晶 

分 类 号：TB43[一般工业技术]