聚酰亚胺多模干涉器结构的加速度传感器  

Numerical Simulations of Multimode Interference Accelerometer Based on Polyimide

作　　者：禹忠[1] 蒋庄德[1] 郑建邦[2] 王海容[1] 

机构地区：[1]西安交通大学精密工程研究所,西安710049 [2]西北工业大学理学院光信息技术实验室,西安710072

出　　处：《半导体光电》2010年第2期185-189,共5页Semiconductor Optoelectronics

基　　金：国家"863"计划项目(2009AA04Z330);国家自然科学基金项目(50535030)

摘　　要：研究了一种基于多模干涉器结构的聚合物波导加速度传感器。根据多模干涉器的自映像原理,输入光场受到加速度作用与干涉区产生相对位移,各模式激励系数发生改变,导致输出场强的变化,从而测得加速度。加速度传感器的悬臂梁形变通过有限元方法进行仿真分析,多模干涉器的光传输性能通过束传播法仿真分析,优化了结构和光学性能。A multimode interference accelerometer making use of the self-imaging effect in a multimode polymer waveguide is proposed and the performance of the accelerometer is simulated. The field excitation efficient changes with the relative displacement between the input/output light filed and the interference area to determine the intensity of the output filed and obtain the acceleration. The expected cantilever defection profiles of the accelerometer are simulated and analyzed with finite element modeling （FEM）, and the transmission of the multimode interference is then simulated with the beam propagation method （BPM）.

关 键 词：多模干涉器 加速度计 聚合物 有限元法 束传播法 

分 类 号：TN256[电子电信—物理电子学]