基于相位反馈控制的压电微音叉扫描探针显微镜  

Scanning Probe Microscopy Using Piezo-electrical Micro-folk Based on Phase Feedback Control

作　　者：黄强先[1] 王广红[2] 万耿华[2] 倪康[2] 

机构地区：[1]合肥工业大学仪器科学与光电工程学院,合肥市工学博士教授230009 [2]合肥工业大学

出　　处：《工具技术》2010年第4期72-75,共4页Tool Engineering

基　　金：国家重点实验室开放基金资助项目(PIL0513);国家自然科学基金资助项目(50975075)

摘　　要：压电微音叉具有谐振频率稳定、品质因数高和易于实现音叉臂的振动检测等优点。利用微音叉的这些特性,将其与钨探针结合,构成了压电微音叉扫描探针显微镜(SPM)测头,可实现对微观表面的测量。该测头扫描时,压电微音叉的谐振频率被试样表面原子和钨探针尖端原子间的作用力调制。探针的谐振状态通过锁相环路(PLL)实现,微音叉测头与试样间的恒定测力及测头的Z向定位通过相位反馈控制实现。此外,测量系统可同时获得试样表面的微观轮廓图和相位图。Piezo-electrical micro-fork has many advantages such as stable resonant frequency,high Q-factor and its vibration is easy to be measured. Based on these advantages of the micro-fork and combining with tungsten tip,a scanning probe microscope（SPM） stylus was constituted and can scan the micro-surface. When the stylus scans the sample,the resonant frequency of the piezo-electrical micro-fork is modulated by the force between the atoms of the sample surface and the tungsten probe＇s tip. The resonant state of the micro-fork is kept stable by phase locked loop（PLL）. The constant scanning force and the localization of probe in Z direction are kept by the phase feedback control technique. Besides,the measuring system can obtain the profile and phase diagram of the sample＇s microstructure simultaneously.

关 键 词：压电微音叉 相位反馈控制 锁相环路 扫描探针显微镜 

分 类 号：TH71[机械工程—测试计量技术及仪器] TH89[机械工程—仪器科学与技术]