提高集成电路组件外观检测速度的算法研究  

Research of Arithmetic on Improving Rapidity in Inspecting Integrate Circuit Module Aspect

作　　者：赵新宇[1] 卢强[1] 黄士坦[1] 

机构地区：[1]西安微电子技术研究所,陕西西安710054

出　　处：《计算机技术与发展》2010年第5期71-74,共4页Computer Technology and Development

基　　金：航天课题支持项目(417010202)

摘　　要：集成电路芯片外观检测中,图像处理算法的精度和速度严重制约了检测质量及效率的提升。鉴于此,文中提出了两种快速检测芯片外观参数的算法——直线拟合算法和主轴算法。上述两种算法根据待检测管脚参数的特点,在选取ROI区域的基础上,只针对所选区域的图像进行相关预处理,从而进一步提高速度。直线拟合算法从待测管脚的边缘点着手进行处理,而主轴算法则关注于管脚的一二阶矩,并根据主轴公式得出所求参数。最后从速度和精度方面对此两种算法的特点进行了对比分析并给出了两种算法的实验结果。In inspecting the chip aspect of integrate circuit,the rate and precision of image procession badly restrict the advance in both inspective quality and efficiency.In view of that,give two methods in fast inspecting the chip parameters ——arithmetic of line fitting and principal axis.The two methods which are above-mentioned can only deal with the ROI（region of interest） on the basis of the parameter characteristics to be test,which can further improve the speed.Arithmetic of line fitting pays attention to the edge point,while principal axis focuses on the first-order moment and second-order moment,then gets the parameters according to the axis formula.In conclusion,the analysis on the two methods in quality and efficiency and the results of the two methods are expressed.

关 键 词：芯片检测 直线拟合 主轴 ROI 亚像素 

分 类 号：TP301.6[自动化与计算机技术—计算机系统结构]