三点法检测环形平面的平面度误差  

Flatness Measurement of Large Annular Planes Based on Three-point Method

作　　者：戴晓磊[1,2] 曹学东[1] 杨文志[1] 吴时彬[1] 

机构地区：[1]中国科学院光电技术研究所,成都610209 [2]中国科学院研究生院,北京100039

出　　处：《光电工程》2010年第5期52-55,62,共5页Opto-Electronic Engineering

摘　　要：基于三点法测量直线度误差原理(三点法误差分离技术),提出了一种新的针对大型环形工件平面度的检测方案。不同于传统的三点法测量直线导轨,该方案以封闭的圆环作为测量对象,测量结果为平面度误差而非直线度误差。叙述了三点法测量原理,以及三点法在大型环形平面的平面度检测中的应用。讨论了调零误差对测量结果的影响。提出一种有效的消除调零误差的数据处理算法,最后对该方法进行了仿真验证和实验。实验结果表明,该方法可以很好地消除调零误差,分离出被测工件的形状误差信号。A method of flatness measurement of large annular planes was designed based on three-point method. By measuring the local curvature of the annular, the overall curve was connected and the flatness measurement of the whole annular was obtained. The measuring principle of three-point method was introduced, as well as the application of three-point method on measurement of large annular planes. The factors of zero error which impact the measurement result were analyzed. Experiments show that the method could solve the problem of flatness measurement of large annular flat parts.

关 键 词：三点法 平面度检测 调零误差 环形平面 

分 类 号：TH706[机械工程—仪器科学与技术]