Characteristics of a novel biaxial capacitive MEMS accelerometer  

作　　者：董林玺 李永杰 颜海霞 孙玲玲 

机构地区：[1]Key Laboratory of RF Circuits and System of Ministry of Education,Hangzhou Dianzi University [2]State Key Laboratory of Transducer Technology,Chinese Academy of Sciences(shanghai) [3]Toshiba Hydro-Electro Equipments Company

出　　处：《Journal of Semiconductors》2010年第5期63-68,共6页半导体学报（英文版）

基　　金：supported by the National Natural Science Foundation of China(No.60506015);the Zhejiang Provincial Natural Science Foundation of China(No.Y107105).

摘　　要：A novel MEMS accelerometer with grid strip capacitors is developed.The mechanical and electrical noise can be reduced greatly for the novel structure design.ANSOFT-Maxwell software was used to analyze the fringing electric field of the grid strip structure and its effects on the designed accelerometer.The effects of the width,thickness and overlapping width of the grid strip on the sensing capacitance are analyzed by using the ANSOFT-Maxwell software.The results show that the parameters have little effect on the characteristics of the presented accelerometer. The designed accelerometer was fabricated based on deep RIE and silicon-glass bonding processes.The preliminary tested sensitivities are 0.53 pF/g and 0.49 pF/g in the x and y axis directions,respectively.A resonator with grid strip structure was also fabricated whose tested quality factor is 514 in air,which proves that the grid strip structure can reduce mechanical noise.A novel MEMS accelerometer with grid strip capacitors is developed.The mechanical and electrical noise can be reduced greatly for the novel structure design.ANSOFT-Maxwell software was used to analyze the fringing electric field of the grid strip structure and its effects on the designed accelerometer.The effects of the width,thickness and overlapping width of the grid strip on the sensing capacitance are analyzed by using the ANSOFT-Maxwell software.The results show that the parameters have little effect on the characteristics of the presented accelerometer. The designed accelerometer was fabricated based on deep RIE and silicon-glass bonding processes.The preliminary tested sensitivities are 0.53 pF/g and 0.49 pF/g in the x and y axis directions,respectively.A resonator with grid strip structure was also fabricated whose tested quality factor is 514 in air,which proves that the grid strip structure can reduce mechanical noise.

关 键 词：MEMS biaxial accelerometer capacitor fringe effect slide-film damping 

分 类 号：TP211.4[自动化与计算机技术—检测技术与自动化装置]