化学溶液沉积法制备红外上转换薄膜工艺的改进  

Improvement of chemical solution deposition method for fabricating infrared up-conversion thin film

作　　者：谢大兵[1] 华文深[1] 黄红军[2] 王运波[3] 吴先权[1] 

机构地区：[1]军械工程学院光学与电子工程系 [2]军械工程学院基础部 [3]中国人民解放军66382部队

出　　处：《光学仪器》2010年第2期85-89,共5页Optical Instruments

摘　　要：分析了以环己烷和无水乙醇的混合液为体系的化学溶液沉积法在制备红外上转换薄膜时存在的问题,提出了部分改进措施。在此基础上,又提出了以硅酸钾和氯化钡的水溶液为体系的化学溶液沉积方案,并详细介绍了改进后的ZnS:Cu,Pb,Mn薄膜的制备步骤。以该方案制备的薄膜成本更加低廉,工艺更加简单,而且具有更好的成膜质量。The problems of chemical solution deposition method for fabricating infrared upconversion thin film which based on the system of mixed solution of cyclohexane and absolute ethanol were analysed, and some improvement measures were presented. Another method which based on the system of solution of potassium metasilicate and barium chloride was proposed, and the detail process of fabricating ZnS：Cu,Pb,Mn thin film was introduced. The new method has lower cost, simpler operation, and better thin film quality.

关 键 词：溶液沉积 电子俘获材料 红外上转换 ZnS:Cu PB Mn薄膜 

分 类 号：TB443[一般工业技术]