亚微压入仪研制中的几个问题  

Main Problems in Development of YY-I Model Submicron Indenter

作　　者：刘军海[1] 陆明珠[1] 苏启生[1] 何家文[1] 

机构地区：[1]西安交通大学材料学院,西安710049

出　　处：《物理测试》1998年第1期45-48,共4页Physics Examination and Testing

摘　　要：YY—1型亚微压人仪是我们开发成功的、用于研究材料表面亚微米级膜层力学性能的高灵敏度、高精度仪器。它主要由测试台及以微型计算机为核心的电气控制系统组合而成。本文主要介绍在其研制过程中遇到的诸多关键技术问题,如微力产生、微位移测量、振动及温度影响、压头与样品表面接触判定、数据采集等。This paper illustrates the main problems and solutions in developing YY-1 model submicron indenter which include how to produce micro load, how to measure indention depth, how to reduce disturbance caused by temperature and vibration, how to judge touch point between indenter tip and sample surface, how to collect data, etc. The indenter consists of main machine and electric control system with computer as control center, and can be used for determining mechanical properties of films on the surface of materials.

关 键 词：亚微压入仪 表面性能 测量 力学性能 

分 类 号：TH87[机械工程—仪器科学与技术]