三维形貌检测中实验条件对测量结果影响的研究  

Study on Effect of Measure Result by Experiment Condition in 3-D Profilometry

作　　者：徐建强[1] 王蕴珊[1] 曲斌 

机构地区：[1]山东工业大学数理系,250061

出　　处：《物理测试》1998年第6期29-33,共5页Physics Examination and Testing

摘　　要：本文就三维物体表面形貌光学精确检测的傅里叶法中,影响其检测精度和测量范围的因素进行了探讨,并重点讨论了采集图象的灰度及光栅投影方向对检测结果的影响。Some factors affecting the measuring accuracy and limit in fourier transform profilometry is discussed. The focal point of discussion was the effecting of measure result caused by image gray and grating direction.

关 键 词：三维形貌测量 低通滤波器 图像灰度 栅线方向 

分 类 号：TG84[金属学及工艺—公差测量技术]