硅压力传感器零点及零点温漂补偿的新方法  

Method for Compensating Zero Point Output and Thermal Zero Drift for a Silicon Pressure Transducer

作　　者：戎华[1] 张声良[1] 马景洁 滕敏[1] 朱长纯[1] 

机构地区：[1]西安交通大学

出　　处：《西安交通大学学报》1999年第1期39-42,共4页Journal of Xi'an Jiaotong University

摘　　要：分析了目前已发表的硅压力传感器零点及零点温漂串并联补偿电阻阻值计算方法的缺陷．提出了一种新的计算方法，并对它进行了简化．使得只需测量流过电桥的电流、桥压以及零点输出，而无需测量电阻就可计算出补偿电阻的大小．实验证明，经一次计算补偿，可使零点温漂降低一个数量级，使用极其方便，尤其适用于批量生产．Resistors in series and in parallel are often used to compensate the zero point output and the thermal zero drift for enhancing the measurement accuracy of a pressure transducer. For the newly proposed method, only the current, voltage and zero point output of the Wheatstone Bridge are necessary for making the calculation of the two resistors. Values for the four arm resistors are not required.Thermal zero drift is very small for a single calculation and compensation. The reduction simplifies application and cuts productiion cost.

关 键 词：压力传感器 零点 零点温漂 病态问题 硅 补偿 

分 类 号：TH823.2[机械工程—仪器科学与技术] TP212[机械工程—精密仪器及机械]