利用准分子激光制备晶体和半导体的纳米粒子  

Synthesis of Nanometer Crystal and Semiconductor Compound Powders by Excimer Laser Ablation

作　　者：楼祺洪[1] 郑隽[1] 魏运荣[1] 董景星[1] 

机构地区：[1]中国科学院上海光机所

出　　处：《中国激光》1999年第1期85-88,共4页Chinese Journal of Lasers

基　　金：激光技术国家重点实验室基金

摘　　要：利用准分子脉冲激光（ＸｅＣｌ，λ＝３０８ｎｍ）对Ｓｉ，红宝石和钛宝石靶进行消融，从而得到ＳｉＯ２和红宝石、钛宝石的钠米级粉末。用透射电镜对粉末的物质形态进行分析，并对消融产生的纳米颗粒在其颗粒大小及分布上予以分析统计。Nanosize powder was formed by using excimer laser ablation of Si, Ti 3+ ∶Al 2O 3 and Cr 3+ ∶Al 2O 3 targets. The powders were analysized by transition electron micrography. The size ditribution was measured to get a closely log normal relation with small geometric standard deviation.

关 键 词：准分子激光 纳米粒子 消融 纳米材料 

分 类 号：TN204[电子电信—物理电子学] TN248.22