微型非本征光纤法布里-珀罗压力传感器  

A Miniature Extrinsic Fiber Fabry-Pérot Pressure Sensor

作　　者：杨春弟[1] 王鸣[1] 葛益娴[1] 戴丽华[1] 

机构地区：[1]南京师范大学物理科学与技术学院江苏省光电技术重点实验室,江苏南京210097

出　　处：《光学学报》2010年第5期1358-1361,共4页Acta Optica Sinica

基　　金：江苏省科技支撑计划(工业)项目(BE2008138)资助课题

摘　　要：设计并研制了一种新的微型非本征光纤法布里-珀罗（F-P）压力传感器。传感器采用普通的商用单模光纤和多模光纤制作。全石英结构,能长期使用,且稳定性好。传感器制作过程仅通过切割光纤、腐蚀光纤和光纤熔接实现,基于F-P多光束干涉原理测量压力。分析了F-P腔的直径、膜厚与灵敏度的关系,确定了传感器的膜厚和腔深等参量,设计了传感器的加工步骤,讨论了氢氟酸腐蚀多模光纤与熔接光纤的关键技术。用单峰谱峰波长法解调出传感器的腔长。建立了实验解调系统,实验结果表明,在0~0.1 MPa范围内,传感器线性好。A new miniature extrinsic Fabry-Pérot（F-P） fiber optical pressure sensor based on fiber fusion and F-P interference is developed.It is made of commercial single-mode fiber and graded-index multimode fiber.Its all-silica structure has good stability for long-term use.The sensor is fabricated by simple techniques involving only cleaving,wet chemical etching and fusion splicing.The relation among the diaphragm thickness,the different cavity radius and the sensitivity is simulated,and the diaphragm thickness and the cavity depth are obtained.The processing step is designed.The key technologies,fiber etching and fiber splicing are discussed.By tracing a peak point in the interference spectrum,the gap length of the sensor can be demodulated.The demodulation system is set up.Experimental results demonstrate that a high linear response in the range of 0 to 0.1 MPa is obtained in this sensor.

关 键 词：光学测量 压力传感器 法布里-珀罗干涉 波长法解调 石英膜 

分 类 号：TN491[电子电信—微电子学与固体电子学]