MEMS热电堆高温测试系统中单晶材料的红外衰减特性研究  

Research on infrared attenuation features of single-crystal material in the high temperature measuring system based on MEMS thermopile sensors

作　　者：王会强[1] 郝晓剑[2] 周汉昌[2] 

机构地区：[1]中北大学信息与通信工程学院电子信息系 [2]中北大学

出　　处：《传感器世界》2010年第4期10-13,共4页Sensor World

摘　　要：在对PerkinElmer公司的MEMS热电堆红外探测器静态和动态特性实验研究的基础上,本文提出了由MEMS热电堆、红外衰减片、靶体和存储模块组成瞬态表面高温测试装置的方案,对拓宽测温上限的关键元件——红外陶瓷衰减片进行了较深入的研究,用MEMS热电堆测量方法测量了氧化锆陶瓷片红外吸收系数,得出了不同厚度氧化锆(熔点为2715℃)陶瓷片红外衰减倍数曲线,为基于MEMS热电堆的表面高温测试装置的设计提供了依据。Based on the research on static and dynamic characteristics of the MEMS thermopile sensors from PerkinElmer Company, an approach to the transient surface high temperature measuring system composed by MEMS thermopiles, infrared attenuator chips, targeted objects and memory modules is proposed. The infrared single-crystal attenuator, which is the key component for extending the temperature measuring upper limit, is studied in a deep way The infrared absorption coefficient of ZrO2 ceramic plate is measured by using MEMS thermopile measuring method , and the infrared attenuation feature curves of ZrO2 ceramic plates （2715~C fusion point）with different thicknesses are achieved , which can provide the bases for the design of high temperature measuring system based on MEMS thermopiles.

关 键 词：MEMS热电堆探测器 瞬态表面高温 红外吸收系数 

分 类 号：TH811[机械工程—仪器科学与技术]