基于模态叠加法的静电微泵吸合现象  

Investigation of Electrostatic Micropump Pull-in Phenomena Based on Mode Superposition Method

作　　者：应济[1] 李俊[1] 林谢昭[1] 徐亮[1] 

机构地区：[1]浙江大学机械工程学系,杭州310027

出　　处：《农业机械学报》2010年第5期198-203,共6页Transactions of the Chinese Society for Agricultural Machinery

基　　金：国家自然科学基金资助项目(50475104);浙江省自然科学基金重点资助项目(Z106519)

摘　　要：利用数值计算和模态叠加法建立了静电致动泵膜的降阶模型,使复杂的吸合过程求解简单化。通过与已有文献中的结果和三维有限元计算值的比较,表明降阶模型能减少求解时间并且具有很高的精度。利用降阶模型参数化研究了残余应力、泵膜厚度、泵膜半径、极板初始间隙对泵膜吸合电压和吸合位置的影响,得到了泵膜设计的准则,为静电微泵的优化设计提供理论基础。Electrostatically actuated circular diaphragm exhibits an instability known as pull-in phenomena,short circuit caused by pull-in with contact is destructive to electrostatic micropump operation.In order to avoid pull-in instability caused by high driving voltage,pull-in voltage should be calculated accurately.Therefore a reduced order model（ROM） based on numerical calculation and mode superposition method was constructed,which could take account of residual stress and geometric nonlinearity.The pull-in voltage and pull-in position computed by ROM have been compared with the existed results and the results calculated by 3-D finite element analysis.It showed that the ROM sped up computational process without sacrificing the accuracy.The effects of different parameters such as residual stress,initial gap,diaphragm radius,diaphragm thickness on pull-in voltage and pull-in position were also investigated by the ROM.In addition,the design criteria of pump diaphragm were obtained,which provided an effective theoretical basis for the optimization design of electrostatic micropump.

关 键 词：微泵 吸合 静电 模态叠加 降阶模型 

分 类 号：TH703[机械工程—仪器科学与技术] TN405[机械工程—精密仪器及机械]