硅基微磁通门非晶Fe_(96)Nb_4铁芯薄膜的研究  

Research on Silicon-Based Micro-Fluxgate Amorphous Fe_(96)Nb_4 Core Thin Film

作　　者：梁晋涛[1,2] 刘诗斌[1] 张程煜[1] 

机构地区：[1]西北工业大学,陕西西安710072 [2]桂林电子科技大学,广西桂林541004

出　　处：《稀有金属材料与工程》2010年第5期871-873,共3页Rare Metal Materials and Engineering

基　　金：国家自然科学基金项目(60874101);西安应用材料创新基金项目(XA-AM-200707);西北工业大学基础基金(w018104)

摘　　要：采用磁控溅射法制备一种适合用于硅基微磁通门的新型非晶Fe96Nb4软磁铁芯薄膜,并利用X射线衍射仪、扫描电子显微镜、振动样品磁强计测试薄膜的相组成、表面形貌、和磁滞回线,用双铁芯磁通门探头线圈对制作的铁芯薄膜进行试验。结果表明:随制备温度的升高,薄膜的缺陷明显减小,软磁性能显著改善。基片温度为630K时制作的硅基Fe96Nb4铁芯薄膜的性能适合用于微磁通门铁芯材料。A new type of amorphous Fe96Nb4 core soft-magnetic thin film suitable for silicon-based micro-fluxgate was prepared by magnetron sputtering technique.Its phase composition,surface morphology and magnetic hysteresis loop were characterized by X-ray diffractometer,SEM and VSM（vibration sample magnetometer）,respectively.The core film was examined by a double-cores fluxgate sensor.The results show that the defects of films decrease when they are prepared at high temperature.Meanwhile,its soft magnetic properties are improved significantly.Silicon-based Fe96Nb4 core thin film prepared at 630 K of the substrate is suitable for the application in the micro-fluxgate iron core materials.

关 键 词：Fe96Nb4铁芯薄膜 软磁 微磁通门 双铁芯磁探头 

分 类 号：TB383.2[一般工业技术—材料科学与工程]