利用稳频激光稳定F-P腔腔长的研究  

The study of the length controlling of Fabry-Perot cavity depending on stabilized laser

作　　者：刘敏[1,2] 崔小虹[2] 钱进[3] 

机构地区：[1]唐山学院基础教学部,河北唐山063000 [2]北京理工大学,北京100081 [3]中国计量科学研究院,北京100013

出　　处：《光学技术》2010年第3期361-364,共4页Optical Technique

基　　金：科技部科技支撑项目(2006BAF06B08)

摘　　要：为实现对F-P腔腔长的控制,设计了F-P腔腔长锁定控制系统。该系统以633nm稳频激光作为基准光源,通过控制系统驱动压电陶瓷调节F-P腔的腔长,以实现将F-P腔的谐振频率锁定到基准光源的频率上。实验结果表明,该方案切实可行,锁定后的F-P腔腔长的不确定度可达10-10量级。该方法在原子沉积技术中对于实现沉积台的稳定具有重要的指导意义。A program is presented to achive the F-P cavity lenth control.According to the first harmonic phase theory and making the frequency of the stabilized laser as a reference,this method can adjust the F-P cavity length by driving peizoelectric ceramic though the control system.The experiment shows that the program is feasible and the length uncertainty of F-P cavity can reach the order of the uncertainty.It has the important guiding significance to realize the stability of deposition setup in atom lithograpy.

关 键 词：F-P腔 稳频激光 沉积台 原子沉积 

分 类 号：TB921[一般工业技术—计量学]