基于原子力显微镜的碳纳米管焊接  

AFM-Based Nano-Welding of Carbon Nanotubes

作　　者：于海波[1,2] 董再励[1] 李文荣[1,3] 

机构地区：[1]中科院沈阳自动化研究所机器人学国家重点实验室,沈阳110016 [2]中科院研究生院,北京100049 [3]香港中文大学微纳米系统中心

出　　处：《纳米技术与精密工程》2010年第3期226-230,共5页Nanotechnology and Precision Engineering

基　　金：国家高技术研究发展计划(863)资助项目(2007AA04Z317)

摘　　要：在利用碳纳米管(CNT)制作纳米电子器件时,碳纳米管与金属电极的接触特性将决定器件性能.为此本文提出了一种利用原子力显微镜(AFM)进行碳纳米管焊接的新方法.仿真研究了探针电场的强度与分布,解释了焊接中电场产生的机理,进一步分析了偏压、探针-样品距离与探针悬臂梁偏转位移之间的关系;并通过这些优选的相关实验参数进行了焊接实验验证.实验结果表明,碳纳米管与电极间的接触电阻由2.86×106Ω减小至7.14×105Ω,并可实现碳纳米管在电极上的良好固定.To fabricate carbon nanotube （ CNT）-based nanoelectronic devices,the contact performance between CNTs and microelectrodes will determine the electric characteristics of nano-devices. Therefore, this paper presented a new method to weld CNTs using an atomic force microscopy （ AFM） . This paper simulated the electric field distribution of the AFM tip,and explained the formation of the electric field in the wielding process. The effect of bias voltage,distance between the tip and sample on the AFM cantilever deflection was also discussed. Furthermore,these optimized experimental parameters were validated through experiments. Experimental results illustrate that the contact resistance between CNTs and microelectrodes has been reduced from 2. 86 × 106 Ω to 7. 14 × 105 Ω,and CNTs can be effectively fixed on the microelectrodes.

关 键 词：原子力显微镜 碳纳米管 纳米器件 纳米焊接 

分 类 号：TH742[机械工程—光学工程] TN05[机械工程—仪器科学与技术]