一种提高显微数控平台控制精度的细分驱动算法  

Micro-driver algorithm for improving the motion precision of micro workbench

作　　者：邓耀华[1,2] 吴黎明[1] 张力锴[1] 陈景郁[1] 苏振锐[1] 

机构地区：[1]广东工业大学信息工程学院,广州510006 [2]华南理工大学机械与汽车工程学院,广州510643

出　　处：《机械设计与制造》2010年第5期188-190,共3页Machinery Design & Manufacture

基　　金：广东省科技计划攻关项目(2004A10403008);广州市科技攻关项目(2007Z2-D3161)

摘　　要：高精密显微数控工作台是IC晶片自动光学检测的核心部件之一,其运动精度直接影响光学检测设备的分辨力,工作台的运动速度和加速度会影响整个IC晶片检测的工作效率。首先给出了高精度工作台的机械设计和工作台嵌入式控制结构,然后针对工作台的驱动精度进行研究,深入分析了驱动电机细分控制中的正余弦细分控制方法,使用细分表查表算法进行计算,分析了查表法存在的不足方面,提出了多级细分控制算法,利用圆的多边形逼近算法动态计算细分电流值,保证了高次细分情况下电机线圈电流矢量的均匀性,使得微步距角的分配更均匀,有效的提高了工作台运动的平稳性和控制精度,为IC晶片的精密检测提供了可靠的保证。High precision workbench is one of the key components of IC wafer optics automatic measurement system,which movement precision would affect the resolving power of optics measurement system,and the speed of moving and acceleration of it would affect the efficiency of the whole system.The physical model of the workbench and the structure of embedded control system are firstly put forward,and then the movement precision of the workbench is studied,especially the Sine-cosine subdivision control arithmetic of the drive motor,the mathematic table structure of subdivision is introduced to analyze the efficiency,then basing on the analysis of deficiency of it the multi-subdivision control arithmetic is put forward,with the use of polygon approximation arithmetic,the real time subdivision electric current is got,the winding current vector homogeneity of motor is guaranteed,and makes micro stepping angle become more homogeneity.The arithmetic not only can improve stability and control precision of the workbench,but also guarantee the precision of IC wafer detecting.

关 键 词：IC晶片检测 高精度工作台 自适应细分 逼近算法 嵌入式 

分 类 号：TH16[机械工程—机械制造及自动化]