温度对微机械全方位姿态传感器灵敏度的影响  

Effect of Temperature on the Sensitivity of Micromachined Omnibearing Posture Sensor

作　　者：宋佳 朴林华 刘玉洁 李言杰 

机构地区：[1]北京信息科技科技大学北京市传感器重点实验室,北京100101

出　　处：《压电与声光》2010年第3期368-371,共4页Piezoelectrics & Acoustooptics

基　　金：国家自然科学基金资助项目(60772012);新世纪优秀人才支持计划基金(NCET)资助项目;北京市优秀人才培养基金资助项目;北京市重点实验室开放课题基金资助项目;北京市属高校人才强教计划基金资助项目(PHR);北京市新世纪百千万人才工程培养基金资助项目;北京市教委科技创新平台基金资助项目(PXM2008_014224_067420);现代测控技术教育部重点实验室基金资助项目

摘　　要：解释了环境温度对微机械气流式全方位水平姿态传感器灵敏度的影响机理。采用有限元方法,通过建立该传感器敏感元件的三维模型计算了不同环境温度下,倾斜10°时敏感元件内的温度场。结果表明,在热源温度一定的情况下,输入恒定倾角时,敏感元件内的温度场随环境温度发生了变化;随着环境温度的增加(下降),敏感元件内两两相对的检测热敏电阻处的温度之差减小(增加),检测电桥输出电压减小(增加),传感器灵敏度降低(升高)。为进一步采取温度补偿,减小该传感器灵敏度的温度漂移提供了理论和实验依据。The effect of mechanism environmental temperature on the sensitivity of micromachined airflow omnibearing level posture sensor was explained.With the method of FEA（finite element analysis）,the temperature fields with tilt angle of 10 ° were obtained in different environmental temperatures,by building the three-dimensional model of the sense organ of the sensor.The results showed that when temperature of the heat source and tilt angle were constant,the temperature field changed with environmental temperature;The temperature difference of two detection hot resistances,which were parallel face to face,decreased（increased） with the increase（decrease） of environmental temperature.This lead to decrease（increase） of output voltage of the electric-bridge or reduce（rise） of sensitivity,and provided theoretical and experimental basises for taking further temperature compensation and reducing the temperature drift of sensitivity.

关 键 词：环境温度 全方位 灵敏度 温度场 

分 类 号：TN379[电子电信—物理电子学] TN37