SrTiO_3氧敏元件的制备及机理分析  

Preparation of Thick Film SrTiO_3 Oxygen Sensor and the Analysis of Sensing Mechanism

作　　者：郭明光[1] 曹全喜[1] 高远[1] 田森[1] 周媛[1] 

机构地区：[1]西安电子科技大学技术物理学院,陕西西安710071

出　　处：《压电与声光》2010年第3期399-401,405,共4页Piezoelectrics & Acoustooptics

基　　金：陕西省自然科学基金资助项目(2002F10)

摘　　要：利用La、Nb进行施主掺杂,以固相合成法制备了高灵敏度的钛酸锶多晶陶瓷厚膜氧传感器。在600～850℃分别测试样品在大气及N2气氛下的电阻,并对样品的灵敏度和阻温特性进行了分析。研究了烧结温度对样品灵敏度、阻温特性等性能的影响,得出最佳烧结温度应在1 250℃。同时对样品敏感机理进行了深入分析,XRD、SEM的分析表明,制备的样品物相纯净且表面疏松。High sensitivity SrTiO3 ceramic oxygen sensor was prepared by solid phase synthesis with La and Nb donor-doped.By testing the resistivity of sample in air atmosphere and N2 atmosphere at 600～850 ℃ respectively,the sensitivity and resistivity-temperature characteristic were analyzed.The influence of sintering temperature on sensitivity and resistivity-temperature characteristic was researched,and the best sintering temperature should be 1 250 ℃.The sensing mechanism was analyzed deeply.XRD and SEM analysis showed that the strontium titanate phase was pure and the sample′s surface was loose.

关 键 词：钛酸锶 施主掺杂 氧传感器 

分 类 号：TN304.92[电子电信—物理电子学]