镍基高温合金微细电解铣削加工实验研究  

Experimental Research on Micro Electrochemical Milling of Nickel Based Alloys

作　　者：余宏兵[1] 曾永彬[1,2] 刘勇[1] 朱荻[1] 

机构地区：[1]南京航空航天大学,南京210016 [2]哈尔滨工业大学微系统与微结构制造教育部重点实验室,哈尔滨150001

出　　处：《中国机械工程》2010年第11期1353-1356,1361,共5页China Mechanical Engineering

基　　金：国家863高技术研究发展计划资助项目(2009AA04Z302);国家自然科学基金资助重点项目(50635040);微系统与微结构制造教育部重点实验室开放基金资助项目(HIT.KLOF.2009001)

摘　　要：针对高深宽比、复杂结构的微型腔,提出了分层电解铣削的工艺。在三轴联动微细加工平台上制作了柱状的微细电极,并在镍基高温合金上进行了微细电解铣削加工实验。研究了加工电压、脉冲参数、不同电极直径对加工精度的影响规律,成功地加工出二维结构和三维型腔。该工艺加工精度高、加工稳定性好。A new process of micro electrochemical milling by layer was proposed for the micro cavity of high aspect ratio and the complex structure. The cylindrical micro electrodes for micro electrochemical milling can be fabricated on-line by electrochemical etching. A series of experiments were carried out to investigate the influence of the predominant parameters such as machining voltage, pulse on-time, electrode diameter on machining accuracy of nickel based alloys, and micro structures with high precision were fabricated successfully.

关 键 词：镍基高温合金 柱状电极 分层铣削 微三维结构 

分 类 号：TG662[金属学及工艺—金属切削加工及机床]