二维零位光栅及其在纳米计量技术中的应用  

Two dimension zero position grating and its application in nano metrology

作　　者：胡翘[1,2] 王文伟[1,2] 黄文浩 李尚志[1,2] 

机构地区：[1]中国科学技术大学精密机械系 [2]中国科学技术大学数学系

出　　处：《电子显微学报》1999年第1期137-140,共4页Journal of Chinese Electron Microscopy Society

摘　　要：本文提出了一种用二维零位光栅来实现超高分辨率的绝对测量方法。利用二维零位光栅作为整个系统的零点，可消除ＳＰＭ仪器的累计误差。本文对二维零位原子光栅的原理，评价指标，评价指标极限的计算，作了详细介绍。本文给出了计算机仿真结果。In this paper, An absolute measurement method by two dimension zero position grating is presented. When two dimension zero position grating is used as SPM Instrument's zero position, the SPM instrument can realize absolute measurement. The paper mainly discusses the principle of two dimension zero position grating and its evaluation index, gives detail discussion of evaluation limit. The computer simulation result and application prospect are also given in the paper.

关 键 词：SPM 零位光栅 纳米计量 二维 超高分辨率 

分 类 号：O48[理学—固体物理] TB921[理学—物理]