激光位移传感器在角度测量中的应用  

Application of laser displacement sensor in measurement of angle

作　　者：朱万彬[1] 钟俊[1,2] 莫仁芸[1,2] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所应用光学重点实验室,吉林长春130033 [2]中国科学院研究生院,北京100039

出　　处：《传感器与微系统》2010年第6期131-133,共3页Transducer and Microsystem Technologies

基　　金：吉林省科技发展计划资助项目(20080339)

摘　　要：激光位移传感器因其较高的测量精度和非接触测量特性,可应用在很多方面,将其用在测量工件的角度上能够实现角度的高精度测量。通过步进电机带动激光位移传感器扫描二面角的2个面,然后对测量的数据采用Matlab程序做最小二乘拟合,得到二面角两边的斜率,从而求出角度。实验中采用的位移传感器分辨率为0.3μm,导轨和步进电机重复定位精度高于3μm,则测量角度的精度高于1″。Laser displacement sensor can be used in many areas because of its high precision and non-contact measuring characteristics. It is used in measurement of angle of the workpiece and can achieved high-precision angle measurement. The laser displacement sensor stepper motor is drived by scan dihedral angle of the workpiece. Least-squares fitting is carried out by Matlab to get the slope of the angle, then the angle is equated. The resolution of displacement sensor used in the experiment is 0.3 angle measurement; laser displacement sensor; least-squares fitting; precisionm, the repetition localization precision of rail and stepper motors is 3 μm,the precision of measuring angles is higher than 1″.

关 键 词：角度测量 激光位移传感器 最小二乘拟合 精度 

分 类 号：TP212.14[自动化与计算机技术—检测技术与自动化装置]