变折射率球面六角形孔径平面微透镜阵列  

Fabrication of Gradient Refractive Index Hexagonal Aperture Planar Microlens Array Based on Spherical Substrate

作　　者：蒋小平[1,2] 刘德森[2] 

机构地区：[1]苏州大学物理科学与技术学院,江苏苏州215006 [2]西南大学物理科学与技术学院,重庆400715

出　　处：《光学学报》2010年第6期1792-1795,共4页Acta Optica Sinica

基　　金：国家自然科学基金(60978046);西南大学发展基金(SWUF2007027)资助课题

摘　　要：提出了一种制作收集光信息视角范围大、光信息利用效率高、具有良好抗外界应力及温度变化能力的曲面微透镜阵列的新方法。采用光刻离子交换工艺,通过对镀钛掩膜、光刻和离子交换等关键工艺的研究和严格控制,在球面玻璃基片上制作了六角形孔径平面微透镜阵列。制作的阵列单元透镜六角形边长0.173mm,窗口间距0.200mm,单片阵列上微透镜元2052个。测试表明,离子交换深度0.198mm,阵列填充率达到98%,阵列成像性能优良,光学均匀性好,旋转椭球状的单元透镜区域折射率呈三维梯度变化,截距、数值孔径自中心向边缘渐变,半径相同处光学性能一致性好。A novel method of fabricating a convex microlens array with wide scope for collecting optical information and transferring it with high efficiently and excellent capabilities of withstanding external stress and temperature is presented.By lithography and ion-exchange,a hexagonal aperture planar microlens array is fabricated on a spherical glass substrate successfully under strict control of the crucial process such as coating titanium,photolithography and ion-exchange etc.There are 2052 microlens in the substrate and each one is with a length of side and an edge-to-edge interval of 0.173 mm and 0.200 mm,respectively.Measurement and test show that the ion-exchange depth is 0.198 mm,the fill factor of the array reaches 98%,and the array has significant characteristics including perfect imaging,fine optical uniformity,ion-exchanged rotation-ellipsoidal region with three-dimensional refractive index profile,intercept and numerical aperture varying from center to edge and well conforming optical performance at same radius.

关 键 词：集成光学 球面微透镜阵列 离子交换 填充率 六角形孔径 

分 类 号：O435.1[机械工程—光学工程]