铝离子掺杂氧化锌薄膜的溶胶-凝胶法制备及性能  

Sol-gel Fabrication and Characterization of Al-doped ZnO Thin Films

作　　者：贾波[1] 苏革[1] 刘天中[2] 曹立新[1] 柳伟[1] 孙武珠[3] 董征[1] 王景[1] 

机构地区：[1]中国海洋大学材料科学与工程研究院,青岛266100 [2]中国科学院青岛生物能源与过程研究所,青岛266101 [3]中国科学院金属研究所,沈阳110016

出　　处：《材料导报（纳米与新材料专辑）》2010年第1期340-342,351,共4页

基　　金：国家教育部留学回国人员科研启动基金项目(教外司留[2007]1108号)

摘　　要：运用室温溶胶-凝胶技术和热处理工艺,在载玻片上制备了铝离子掺杂的ZnO薄膜。采用X射线衍射(XRD)和扫描电子显微镜(SEM)对薄膜的成分、结构和形貌进行了表征;采用紫外-可见光分光光度计对薄膜的透光性能进行了研究。结果表明,所制备的氧化锌薄膜为六方纤锌矿结构,沿c轴方向择优生长;铝离子的掺杂没有改变氧化锌的基本结构,所掺杂的铝离子为取代锌离子的替位掺杂;热处理后,氧化锌颗粒为六角形针(柱)状形貌;随着热处理温度的升高,薄膜的透光率增大;经600℃热处理后随着铝离子掺杂浓度的增加,薄膜的透光率先增大后减小,当铝离子掺杂浓度为2%时透光率最大;当铝离子掺杂浓度较大时,晶格畸变的影响使薄膜的透光率减小。当溶胶浓度为0.6mol/L、铝离子掺杂浓度为2%和热处理温度为600℃时,所制备薄膜的质量和性能最好。Al-doped zinc oxide thin films are prepared on glass slides by sol-gel process at room temperature plus heat post-treatment. X-ray diffraction（XRD） and scanning electron microseope（SEM） are employed to analyze the composition, structure and morphology of the films. Ultraviolet-visible spectrophotometry is applied to measure transmittance properties of the films. Results show that the thin films obtained possess hexagonal wurtzite structure with highly preferred orientation along the （002） plane. Al^3＋ doping into ZnO films don＇t affect the basic ZnO crystal＇form of the films. It is found that the Al^3＋ substitutes the Zn＇s place in ZnO lattice, i. e. substitute doping. After heat treatment, Al^3＋-doped ZnO grains show hexagonal needle-shaped（or pillar shape） crystal morphology. The higher the heat treatment temperature is, the better the transmittance of the films is. For the film after heating at 600℃, the transmittance of the film increases first and decreases afterwards with the increase of Al^3＋ doping concentration, the best transmittance presents at 2 % of Al^3＋ doping concentration. The effect of lattice deformation arising from the dopants, which leads to the decrease of the transmittance of the film, can not be ignored at higher Al^3＋ doping concentration anymore.

关 键 词：溶胶-凝胶法 铝离子掺杂氧化锌 透光率 

分 类 号：TB383[一般工业技术—材料科学与工程]