Design and fabrication of the GaAs integrated optical chip for fiber optical gyroscope  

作　　者：李陈刚 杨建义 李锡华 王明华 

机构地区：[1]Institute of Microelectronics and Optoelectronics,Zhejiang University

出　　处：《Optoelectronics Letters》2010年第4期269-271,共3页光电子快报（英文版）

基　　金：supported by the National Natural Science Foundation of China (No.60676028);the Major State Basic Research Development Program of China (No. 2007CB307003)

摘　　要：An integrated optical chip for fiber optical gyroscope(FOG) is designed and fabricated on GaAs.To achieve a high modulation efficiency and a small chip size,a deeply etched waveguide structure is employed,and accordingly a multimode interference(MMI) coupler is used as the 1 × 2 power splitter.The size of the chip is about 8.5 mm × 0.5 mm,which is much smaller than that of LiNbO3-based chips.The experimental results show that the extinction ratio(ER) of the TE mode to the TM mode is over 26 dB and the value of Vπ·L of the phase modulators is 18 V·cm.The method to further lower Vπ is discussed.An integrated optical chip for fiber optical gyroscope（FOG） is designed and fabricated on GaAs.To achieve a high modulation efficiency and a small chip size,a deeply etched waveguide structure is employed,and accordingly a multimode interference（MMI） coupler is used as the 1 × 2 power splitter.The size of the chip is about 8.5 mm × 0.5 mm,which is much smaller than that of LiNbO3-based chips.The experimental results show that the extinction ratio（ER） of the TE mode to the TM mode is over 26 dB and the value of Vπ·L of the phase modulators is 18 V·cm.The method to further lower Vπ is discussed.

关 键 词：芯片制造 集成光学 光纤陀螺 设计 砷化镓 相位调制器 芯片尺寸 波导结构 

分 类 号：TN253[电子电信—物理电子学]