提高能谱无标样定量分析准确度的参数选择  

Research on Improvement of Accuracy of EDS Analysis with Out-Standard Sample

作　　者：叶建海[1] 包生祥[1] 王娇[1] 张德政[1] 

机构地区：[1]电子科技大学电子薄膜与集成器件国家重点实验室,四川成都610054

出　　处：《分析测试技术与仪器》2010年第2期123-126,共4页Analysis and Testing Technology and Instruments

摘　　要：针对如何提高X射线能谱仪(EDS)无标样定量分析的准确度,进行了一系列实验研究和理论分析.讨论了样品制样的基本要求,能谱分析过程中加速电压、收集时间和分析区域等方面对能谱分析结果的影响及其最佳的选择参数,如对于轻元素分析应采用较低电压、分析时间过长可能导致样品在电子束轰击下引起更大碳沉积等,通过合理的参数选择均能得到较为满意的分析结果,提高了定量测试的准确度.In order to improve the accuracy of quantitative analysis on an energy dispersive X-ray spectrometer（EDS）,the optimal instrumental working parameters were searched based on theoretical analysis and experimental study.The basic requirements for sample preparation,accelerating voltage,collection time and the analysis of regional were discussed and the impact on the energy spectrum and the best option parameters were studied.For example,a low accelerating voltage should be used for a light element analysis,and excessive analysis time could induce more carbon deposition after prolonged electron beam bombardment.More satisfactory results were obtained by choosing reasonable parameters and the accuracy of the quantitative test can be improved.

关 键 词：X射线能谱仪 无标样定量分析 准确度 工作参数 

分 类 号：O657.3[理学—分析化学]