计量型扫描显微镜中大行程纳米定位系统研制  

Development of large range nano-positioning system used in metrological scanning microscope

作　　者：刘振[1] 李岩[1] 

机构地区：[1]清华大学精密仪器与机械学系,精密测试技术及仪器国家重点实验室,北京100084

出　　处：《光电子．激光》2010年第7期957-962,共6页Journal of Optoelectronics·Laser

基　　金：中德科学中心国际合作资助项目(GZ404(303/2))

摘　　要：为克服现有计量型扫描探针显微镜(SPM)测量范围小、测量速度低的不足,提出了快速共焦显微镜和SPM结合的大量程、高速、可溯源扫描显微镜,实现了一种大行程纳米定位系统,用于显微镜的扫描定位。系统包括伺服电机驱动的两维机械位移台和压电陶瓷(PZT)驱动的三维柔性铰链微动台,具有双伺服环运动控制机制,由双频激光干涉测量系统进行反馈和溯源。为抑制系统噪声,提高定位精度,设计了数字切比雪夫滤波器,将噪声减小85%。在100 mm×100 mm×20μm行程内,系统具有优于5 nm的定位精度和2 nm的分辨率。To overcome the shortcomings of limited range and low measurement speed in current scanning probe microscope（SPM）,a large range scanning microscope for fast,high accurate and traceable nano measurement and metrology is proposed,which combines the fast optical confocal microscope and SPM.A large range nano-positioning system used as scanning stage in this microscope is implemented,which consists of two stages：a coarse stage driven by servo motors in two dimensions and a flexible-hinge fine stage driven by PZT actuators in three dimensions.A dual-servo control mechanism is designed for motion control and a laser interferometric measurement system is established for feedback and traceability.To remove the noise components,this system employs a digital Chebyshev filter,which reduces the noise level by 85%.Experimental results show that this system has the positioning accuracy better than 5 nm and the resolution better than 2 nm.

关 键 词：大量程计量型扫描显微镜 纳米定位 两级进给 双伺服环控制 数字滤波 

分 类 号：TH741[机械工程—光学工程]