基于激光技术的亚纳米级位移测量系统的研究  

Research on a sub-nanometer displacement measuring system based on laser technology

作　　者：曲兴华[1] 王丽华[1,2] 

机构地区：[1]天津大学精密测试技术及仪器国家重点实验室,天津300072 [2]上海计量测试技术研究院,上海201203

出　　处：《仪器仪表学报》2010年第6期1276-1281,共6页Chinese Journal of Scientific Instrument

基　　金：国家自然科学基金(50875185);天津市应用基础及前沿技术研究(09JCZDJC23600)资助项目

摘　　要：研究和开发一种基于激光技术的新型亚纳米级位移测量系统。在马赫-曾德干涉仪的基础上进行改进,结合激光多普勒技术和激光偏振干涉技术,设计新型激光干涉测量光路,具有抗干扰能力更强、光路简单、易于安装调试等特点。将DSP技术引入激光干涉仪的信号处理系统,研究改进的8细分算法,完成对干涉条纹的细分、辨向和计数功能。经实验分析和研究证明,测量分辨力达到0.16 nm,运行速度可达0.14 mm/s,量程可达4μm,上述方法有效可行,可实现被测物体的亚纳米级位移测量。A new sub-nanometer displacement measuring system is researched and developed based on laser technology.Through combining laser Doppler technology and laser polarization technology,the Mach-Zehnder interferometer is improved and a new optical path for the laser interferometer is designed.The working principle of the interferometer is introduced and its advantages over normal interferometer are analyzed.Digital signal processing（DSP） technology is used in the laser interferometer;an improved 8-subdivision algorithm is studied and the functions of direction discerning,sub-division and period counting are realized.The measurement resolution is 0.16 nm within the scale of 4 μm.The highest moving velocity is 0.14 mm/s.Experiments prove that this method is feasible and effective and can be used to implement sub-nanometer displacement measurement of objects.

关 键 词：精密测量 亚纳米级位移 激光多普勒技术 偏振干涉 

分 类 号：TH711[机械工程—测试计量技术及仪器]