微波多层电路过孔散射参数测量方法  

Measurement method of scattering parameters for via holes in microwave multilayer circuits

作　　者：田雨[1] 童玲[1] 

机构地区：[1]电子科技大学自动化工程学院,成都611731

出　　处：《电子测量与仪器学报》2010年第6期555-560,共6页Journal of Electronic Measurement and Instrumentation

基　　金：电子测试技术国家重点实验室基础研究基金(编号:6143902)资助项目

摘　　要：过孔属于典型三维不连续结构,是微波多层电路层间互连的重要形式。通过测量获得过孔结构的散射参数是验证相应理论分析和设计方法必不可少的环节。文中提出一种测量过孔散射参数的方法,通过对被测过孔结构的二次加工和夹具的特殊设计,解决了被测件与夹具的连接问题,并且使用移动测量参考面的方法实现了校准件设计和后期测量结果去嵌入的处理。加工测量的频段从10MHz^20GHz,从实际测量与软件仿真结果的对比可以看出,测量连接和夹具的影响已被去除,得到了更准确的反映过孔特性的测量结果。Via holes are typical three-dimensional discontinuous structures and important interconnection forms among different layers in microwave multilayer circuits. So the scattering parameter of via-holes acquired by measurement is the key step in order to verify the corresponding theoretical analysis and design. The measurement method for the scattering parameter of via-holes is presented in the paper. The test connection problems can be solved by secondary processing for via holes under test and the special design for the fixture. The design of calibrations and de-embedding results are achieved by moving the measurement reference plane. The operating frequency covers from 10MHz to 20GHz. Compared with results from the simulation software, the advert side-effects caused by the measurement connection and the fixture have been removed from the original results, furthermore, the measurement-result which reveals via feature more accurately could be acquired.

关 键 词：过孔 微波多层电路 散射参数 去嵌入 

分 类 号：TP206[自动化与计算机技术—检测技术与自动化装置]