微流量传感器及其在压电泵闭环控制中的应用  

MEMS Flow Sensor and Its Application to Piezoelectric Pump Closed-Loop Control System

作　　者：杨晓亚[1] 刘亚欣[1] 陈立国[1] 曲东升[1] 荣伟彬[1] 

机构地区：[1]哈尔滨工业大学机器人技术与系统国家重点实验室,黑龙江哈尔滨150080

出　　处：《中北大学学报（自然科学版）》2010年第3期306-312,共7页Journal of North University of China(Natural Science Edition)

基　　金：国家863高技术研究发展计划项目(2007AA04Z311;2007AA04Z336);国家自然科学基金资助项目(60605025)

摘　　要：在现有压电泵研制基础上,开发了一种基于压差原理的微流量传感器并将其集成到压电泵闭环控制系统中,实现了压电泵输出试剂体积精确闭环控制.通过理论计算,指出了传感器的设计原理和传感器芯片设计原则,进而完成了传感器的封装;为方便观察传感器检测的流量信号,设计了传感器信号的显示模块;通过实验实现了传感器信号的标定和性能的测试;最后搭建压电泵闭环控制系统,并引入了模糊P ID控制算法进行精确体积试剂分配控制,通过试剂分配测试实验表明,当期望分配体积100μL时该系统试剂分配偏差小于0.1μL,具有较好的精度.A MEMS flow sensor was integrated with a PZT pump to form a closed-loop drug delivery system.Benefiting from the feedback of sensor information,the system could self-adjust the driving voltage of the PZT pump to accurately control the desired drug volume without pre-calibration.First,the structure and principle of the PZT pump were introduced briefly.Secondly,the MEMS flow sensor was presented.Thirdly,the fuzzy PID closed-loop control strategy was proposed to calculate and adjust the driving voltage in real-time.Finally,experiments with fuzzy PID closed-loop control method were carried out,and experiment results show that the drug delivery system can accurately delivery drug volume with the error smaller than 0.1 μL when the desired volume is 100 μL.It indicates that the pump dosing system has high reproducibility and accuracy.

关 键 词：流量传感器 压电泵 MEMS 模糊PID 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]